Pillars array

CD Metrology and Scatterometry:

Arrays of Pillars 

Critical Dimension Metrology of Pillar Diameters 

In the figure below, we show measurements obtained by our LabScatter instrument on three distinct arrays of pillars for two different polarizations (TE and TM). Measured curves (dots) are accompanied by the fitted models (solid lines). Each sample has a different pitch and diameter. The comparison between the values obtained by LabScatter and scanning electron microscope (SEM) are shown in the tables below. Excellent agreements between measurements and models ensure the quality of the fits and accurate assessment of the pillar's diameters.   

(Fabrication method: Nanoimprint lithography)